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| Purpose | Energy dispersive X-ray fluorescence coating thickness measurement and material analyzer (EDXRF), used for measuring ultra-thin coatings and complex coating structures on printed circuit boards | |||
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| Measurement direction | from top to bottom | |||
| Application | Based on the characteristics of multi capillary optical systems, it is the best choice for measuring the thickness of Au and Pd coatings on microstructures. | |||
| X-ray source | X-ray source | Standard: Ultra tungsten target micro focusing tube with beryllium window Optional: Molybdenum target micro focused X-ray tube with beryllium window |
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| High pressure | Three levels:10 kV,30 kV,50 kV | |||
| Primary filter | Multiple switchable options:Ni 10 μm;空气;Al 1000 μm;Al 500 μm | |||
| X-ray optical system | Multi capillary tube | |||
| Multi capillary tube/detector | Standard type 17 μ m | 17 μm halo-free* | 10 μm | |
| Measurement point (half width at half maximum of Mo-K α) | ≤ ∅17 μm | ≤ ∅17 μm | ≤ ∅10 μm | |
| X-ray detector | Peltier cooled silicon drift detector (SDD), equipped with the latest DPP+digital pulse processor | |||
| Element Range | From aluminum Al (13) to uranium U (92) - up to 24 elements can be measured simultaneously | |||
| measure distance(From the surface of the sample to the lower edge of the measuring head) | Fixed, approximately 4-5 mm | Fixed, approximately 4-5 mm | Fixed, approximately 1.5-2 mm | |
| The most available sample placement area | Width x Depth: 600 x 600 mm | |||
| Large range of movement | 450 × 300 mm | |||
| Maximum mobile speed on X/Y platform | 60 mm/s | |||
| X/Y platform mobile repeatability accuracy | Unidirectional ≤ 5 μ m | |||
| Maximum weight/height of sample | 5 kg / 10 mm | |||